Hydrogen Sensors Based on In2O3 Thin Films with Bimetallic Pt/Pd Catalysts on the Surface and Tin and Dysprosium Impurities in the Bulk

This paper presents the results of studying characteristics hydrogen sensors based on thin In2O3 films modified with tin and dysprosium dispersed double Pt/Pd catalysts deposited surface. To control content Sn Dy in films, an original technology was developed, ceramic targets were fabricated from powders In–Dy–O, Dy–Sn–O, In–Dy–Sn–O systems synthesized by sol–gel method. Films complex composition obtained RF magnetron sputtering corresponding targets. Structural features studied Raman spectroscopy. It is shown that various combinations concentrations, as well presence surface, have a significant effect defectiveness density oxygen adsorption centers. As result, resistance pure air (R0), activation energies temperature dependences R0, bending energy bands at grain boundaries semiconductor, responses to action concentration range 20–25,000 ppm change. A unique feature Pt/Pd/ In2O3: (0.5 at%), (4.95 at%) their high sensitivity 20–100 absence signal saturation region concentrations 5000–25,000 ppm, allowing them be used detect H2 wide concentrations.